The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Mar. 10, 2000
Applicant:
Inventor:
Minoru Numoto, Mitaka, JP;
Assignee:
Tokyo Seimtsu Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 7/00 ;
U.S. Cl.
CPC ...
B24B 7/00 ;
Abstract
An apparatus for polishing wafers in which a first pushing means for imparting a pushing force to a carrier is arranged along the outer peripheral portion under the lower surface of a head body and a second pushing means for imparting a pushing force to a retainer ring is arranged at a central portion under the lower surface of the head body. The first and second pushing means are formed of air bags and