Ming-Shu Kuo

Title: Inventor Ming-Shu Kuo: Pioneering Innovations in Silicon Etching

Introduction

Ming-Shu Kuo, an accomplished inventor based in San Ramon, California, has made significant contributions to the field of semiconductor technology. With a focus on advanced etching methods, he holds two patents that stand out in the rapidly evolving tech industry. His work is instrumental in enhancing the efficiency and precision of silicon processing.

Latest Patents

Ming-Shu Kuo's latest patents reflect his innovative approach to tackling complex challenges in semiconductor fabrication. One of his notable inventions is "Residue-Free Systems and Methods for Isotropically Etching Silicon in Tight Spaces." This patent describes a sophisticated system designed to etch a substrate by arranging a first structure made of silicon dioxide or silicon nitride alongside a dummy structure made of silicon. The process involves supplying carrier gases, including nitrogen trifluoride and molecular hydrogen, to generate plasma in the processing chamber, effectively etching the dummy structure.

The second patent, titled "Method for Providing Vias," details a technique for forming via holes through an etch layer under a patterned organic mask. By treating the patterned organic mask with a gas that includes hydrogen and forming plasma, the method rounds the via holes for superior precision, which is crucial in semiconductor device manufacturing.

Career Highlights

Ming-Shu Kuo is associated with Lam Research Corporation, a leading company specializing in wafer fabrication equipment and services. His expertise in etching technology has contributed to the advancement of processes that underpin modern electronics. Through his work at Lam Research, Kuo has solidified his reputation as a forward-thinking inventor, driving innovations that meet the growing demands of the semiconductor sector.

Collaborations

Throughout his career, Ming-Shu Kuo has collaborated with talented professionals in his field, including Gowri Kamarthy and Siyi Li. These partnerships not only enhance the breadth of knowledge and creativity within their team but also lead to groundbreaking advancements in technology that have a lasting impact on the industry.

Conclusion

Ming-Shu Kuo’s contributions to semiconductor technology through his innovative patents and collaborative efforts underscore his role as a key inventor in this critical field. His work at Lam Research Corporation exemplifies the importance of research and development in pushing the boundaries of what is possible in silicon etching and beyond. As technology evolves, Kuo’s innovations will continue to play a vital role in shaping the future of electronics.