Company Filing History:
Years Active: 2018
Title: **Inventor Ming-Sen Tung and His Contributions to Lithography**
Introduction
Ming-Sen Tung is an innovative inventor based in Hsin-Chu, Taiwan. He has made significant strides in the field of lithography, a critical process in the manufacturing of semiconductors. With one patent to his name, his work reflects a strong commitment to advancing technology in the semiconductor industry.
Latest Patents
Ming-Sen Tung holds a patent titled "Lithography process and system with enhanced overlay quality." This patent encompasses a method that includes several intricate steps. First, a resist layer is formed on a patterned substrate. Next, the process involves collecting first overlay data from the substrate, followed by determining an overlay compensation based on the mapping of second overlay data from an integrated circuit (IC) pattern to the first overlay data. The method continues by performing a compensation process within a lithography system according to the overlay compensation, culminating in a lithography exposing process to the resist layer that accurately images the IC pattern.
Career Highlights
Ming-Sen is currently employed at Taiwan Semiconductor Manufacturing Company Limited (TSMC), one of the foremost leaders in semiconductor manufacturing worldwide. His expertise in lithography processes has been crucial in improving the quality and efficiency of IC production, positioning TSMC at the forefront of technological advancement in the industry.
Collaborations
Throughout his career, Ming-Sen Tung has collaborated with talented colleagues, including Chi-Cheng Hung and Wei-Liang Lin. Their combined efforts contribute to TSMC's ongoing mission to innovate and enhance semiconductor manufacturing processes.
Conclusion
Ming-Sen Tung's contributions to the field of lithography demonstrate the importance of innovation in semiconductor technology. His patented methods are vital in enhancing overlay quality, leading to improvements in integrated circuit manufacturing. As TSMC continues to evolve, the work of inventors like Tung remains pivotal in shaping the future of technology.