This inventor holds 6 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2001-2003.
Location History:
- Pauchino, TW (2001)
- Panchiao, TW (2001 - 2002)
- Hsin-chu, TW (2002)
- Taipei, TW (2002)
- Sen-Kan, TW (2003)
Company Filing History:
5 out of 42,759 
Years Active: 2001-2003
Title: Innovations of Ming-Huei Lui
Introduction
Ming-Huei Lui is a prominent inventor based in Panciao, Taiwan. He has made significant contributions to the field of semiconductor fabrication, holding a total of 6 patents. His work focuses on improving processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of his latest patents is a method of resist stripping over low-k dielectric material. This innovative process is designed for photoresist stripping during the fabrication of semiconductor integrated circuits that utilize porous low-k dielectric materials, such as OSG or HSQ. The method allows for photoresist stripping in microwave or RF generated plasmas using gaseous mixtures of NH and CO, ensuring that there is no damage to the underlying layers of OSG or HSQ. Optimum results are achieved when the ratio of CO to NH is maintained between approximately 0.8 and 1.2. Another notable patent involves a dual damascene structure employing a laminated intermediate etch stop layer. This method facilitates the formation of a dual damascene aperture within microelectronic fabrication, utilizing a bottom etch stop layer made of a first material and an intermediate etch stop layer formed as a laminate of a second material.
Career Highlights
Ming-Huei Lui is currently associated with Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and contribute to advancements in semiconductor technology. His expertise in the field has led to the development of processes that significantly improve manufacturing efficiency.
Collaborations
Throughout his career, Ming-Huei has collaborated with notable colleagues, including Jen-Cheng Liu and Chia-Shiung Tsai. These collaborations have further enriched his work and contributed to the success of various projects.
Conclusion
Ming-Huei Lui's contributions to semiconductor fabrication through his innovative patents demonstrate his commitment to advancing technology in this critical field. His work continues to influence the industry and pave the way for future innovations.