Company Filing History:
4 out of 357 
1 out of 7,074 
1 out of 2,029 
Years Active: 1999-2004
Title: The Innovations of Ming-Cheng Yang
Introduction
Ming-Cheng Yang is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of chemical mechanical polishing (CMP) technology. With a total of 7 patents to his name, Yang has developed innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of Yang's latest patents is a chemical mechanical polishing (CMP) apparatus with temperature control. This apparatus is designed to control the circular zone temperature of the wafer during the polishing process. It comprises a platen, a carrier that holds the wafer against the platen, a guide ring to mount the wafer, and a heater that can be positioned in various locations. The heater's temperature is adjustable between 20°C and 60°C, which improves the polishing rate at the edge of the wafer and reduces the polishing difference between the edge and the center.
Another notable patent is a method for avoiding defects produced in the CMP process. This method involves sequentially depositing a first dielectric layer and a second dielectric layer on a semiconductor substrate. The process includes forming a plurality of first holes in predetermined contact window areas, wet etching the first dielectric layer, and filling the second holes with a conductive layer before performing the CMP process to level off the layers.
Career Highlights
Ming-Cheng Yang has worked with several notable companies throughout his career, including Promos Technologies, Inc. and United Microelectronics Corporation. His experience in these organizations has allowed him to refine his skills and contribute to advancements in semiconductor technology.
Collaborations
Yang has collaborated with several professionals in his field, including Jiun-Fang Wang and Champion Yi. These collaborations have fostered innovation and have led to the development of cutting-edge technologies in CMP processes.
Conclusion
Ming-Cheng Yang's contributions to the field of chemical mechanical polishing have made a significant impact on semiconductor manufacturing. His innovative patents and collaborative efforts continue to drive advancements in this critical area of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.