Company Filing History:
Years Active: 2010-2011
Title: Min Xiang - Innovator in Dielectric Layer Properties
Introduction
Min Xiang is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of dielectric layer properties, holding a total of 2 patents. His work focuses on innovative methods and apparatuses that enhance the understanding and measurement of dielectric materials.
Latest Patents
Min Xiang's latest patents include a "Method and apparatus for determining dielectric layer properties." This invention discloses a technique for determining dielectric layer properties such as dielectric thickness and leakage for multilayer film stacks on semiconducting or conducting substrates. The method involves depositing electrical charge at localized regions on the surface of the dielectric layer and measuring electrical quantities to derive properties of the layer.
Another notable patent is "Substrate conditioning for corona charge control." This invention describes a measurement system designed to take readings in a test zone on a substrate's surface. The system includes a chamber that creates an environment for surface treatment, charge deposition, and QV measurement, ensuring reliable measurements by controlling charge spreading with stabilizing chemicals.
Career Highlights
Min Xiang is currently employed at Kla Tencor Corporation, where he continues to innovate in the field of dielectric materials. His work has been instrumental in advancing measurement techniques that improve the stability and reliability of QV measurements on reactive dielectrics.
Collaborations
Min Xiang collaborates with talented coworkers, including Xiafang Zhang and Nanchang Zhu. Their combined expertise contributes to the success of their projects and the advancement of technology in their field.
Conclusion
Min Xiang is a dedicated inventor whose work in dielectric layer properties has led to significant advancements in measurement techniques. His contributions continue to impact the field positively, showcasing the importance of innovation in technology.