Min-Sung Jeon

Title: Min-Sung Jeon: Innovator in Ion Beam Technology

Introduction

Min-Sung Jeon is a notable inventor based in Jeoniu, South Korea. He has made significant contributions to the field of semiconductor equipment, particularly in ion beam technology. With a total of 3 patents to his name, Jeon continues to push the boundaries of innovation in his field.

Latest Patents

One of Jeon's latest patents is focused on boron implanting using a co-gas. This invention discloses an apparatus and methods aimed at improving the ion beam quality of a halogen-based source gas. The introduction of a noble gas, such as argon, into an ion source chamber unexpectedly increases the percentage of desirable ion species while reducing contaminants and halogen-containing ions. This advancement is particularly beneficial in non-mass analyzed implanters, where all ions are implanted into the workpiece. In one embodiment, a first source gas, comprising a dopant and a halogen, is introduced into an ion source chamber, along with a second source gas comprising a hydride and a third source gas comprising a noble gas. The combination of these three source gases results in an ion beam with a higher percentage of pure dopant ions than would occur without the third source gas.

Career Highlights

Min-Sung Jeon is currently employed at Varian Semiconductor Equipment Associates, Inc. His work has been instrumental in advancing ion implantation techniques, which are crucial for semiconductor manufacturing. His innovative approaches have garnered attention in the industry, showcasing his expertise and commitment to technological advancement.

Collaborations

Jeon has collaborated with notable colleagues, including Bon-Woong Koo and Timothy J. Miller. These partnerships have contributed to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Min-Sung Jeon is a prominent figure in the realm of ion beam technology, with a focus on improving semiconductor manufacturing processes. His innovative patents and collaborations highlight his significant contributions to the industry.