Min Goo Hur

Title: Min Goo Hur: Innovator in Plasma Technology

Introduction

Min Goo Hur is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of plasma technology, holding a total of 8 patents. His work focuses on developing advanced equipment for semiconductor processes and hazardous material abatement.

Latest Patents

Among his latest innovations is a plasma cleaning apparatus designed to enhance semiconductor manufacturing processes. This apparatus features a metal chamber connected to a vacuum tube, a gate assembly, a dielectric, and a high voltage electrode. The design allows for efficient cleaning of semiconductor surfaces, which is crucial for maintaining product quality. Another notable patent is a plasma reactor aimed at abating hazardous materials found in process gases. This reactor is strategically installed on the exhaust path of process gases, ensuring that harmful substances are effectively neutralized before reaching the vacuum pump.

Career Highlights

Min Goo Hur has worked with esteemed institutions such as the Korea Institute of Machinery and Materials and the Korea Atomic Energy Research Institute. His experience in these organizations has allowed him to refine his expertise in plasma technology and its applications in various industries.

Collaborations

Throughout his career, Min Goo Hur has collaborated with talented individuals, including Woo Seok Kang and Seung Dae Yang. These partnerships have fostered innovation and contributed to the advancement of plasma technology.

Conclusion

Min Goo Hur's contributions to plasma technology and his impressive portfolio of patents highlight his role as a leading inventor in the field. His work continues to influence the development of advanced manufacturing processes and environmental safety measures.