Tama, Japan

Mikio Shimizu


Average Co-Inventor Count = 2.7

ph-index = 5

Forward Citations = 320(Granted Patents)


Company Filing History:


Years Active: 2000-2002

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5 patents (USPTO):Explore Patents

Title: Mikio Shimizu: Innovator in Semiconductor Technology

Introduction

Mikio Shimizu is a prominent inventor based in Tama, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His innovative designs and devices have advanced the technology used in semiconductor processing.

Latest Patents

One of his latest patents is a semiconductor-manufacturing device. This batch-processing type device features a cylindrical reaction chamber with its upper end closed and its bottom end open. It includes a substrate-supporting boat that loads multiple substrates, which are inserted within the reaction chamber. An injector sprays a reaction gas onto the substrates and is provided parallel to the substrate-supporting boat within the chamber. The injector is supported by an injector holder, and both components are fitted using a male-female fitting structure.

Another notable patent is a substrate-holding apparatus for processing semiconductors. This apparatus is designed to hold a semiconductor substrate in a semiconductor processor. It includes a mount block made of an aluminum alloy wrought product, which has a mount surface for the semiconductor. Additionally, it features a heating block with a heater body embedded for heating the semiconductor substrate, along with a shield member made of an aluminum alloy wrought product to house the heating block. The mount plate is securely attached to the heating block by brazing or with bolts.

Career Highlights

Mikio Shimizu has worked with several notable companies throughout his career. He has been associated with ASM Japan K.K. and NHK Spring Co., Ltd. These experiences have allowed him to apply his innovative ideas in practical settings, contributing to advancements in semiconductor technology.

Collaborations

Throughout his career, Mikio has collaborated with talented individuals such as Kiyoshi Sato and Toshihiko Hanamachi. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.

Conclusion

Mikio Shimizu's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.

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