The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2000
Filed:
Jul. 01, 1999
Applicant:
Inventors:
Kiyoshi Satoh, Tama, JP;
Mikio Shimizu, Tama, JP;
Assignee:
ASM Japan K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118728 ; 118724 ; 118725 ; 156345 ;
Abstract
A supporting structure of a susceptor for semiconductor processing includes: (a) a plate having a carrying surface for placing a semiconductor substrate thereon, which plate has a back surface having a first coupling structure with a first pawl; and (b) a heating block for heating the semiconductor substrate, which heating block has an upper surface in contact with the back surface of the plate. The upper surface has a second coupling structure with a second pawl corresponding to the first coupling structure with the first pawl. A coupler may be used for placing the first pawl and the second pawl in pressure contact to couple the plate and the heating block.