Company Filing History:
Years Active: 2015-2020
Title: Mikhail Haurylau: Innovator in Wafer Defect Detection
Introduction
Mikhail Haurylau is a prominent inventor based in San Jose, CA (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of wafer defect detection. With a total of 8 patents to his name, Haurylau continues to push the boundaries of innovation in this critical industry.
Latest Patents
One of Haurylau's latest patents focuses on systems and methods for determining information for defects on wafers. This innovative system includes an illumination subsystem that directs light with specific wavelengths to a wafer. The wavelengths are carefully selected to induce fluorescence from certain materials on the wafer while avoiding fluorescence from others. Additionally, the system features a detection subsystem that can identify only the fluorescence from the targeted materials or detect non-fluorescent light without capturing the fluorescence. A computer subsystem is also integrated to analyze the output from the detection subsystem, enabling the determination of defect information on the wafer.
Career Highlights
Haurylau is currently employed at KLA Corporation, a leader in process control and yield management solutions for the semiconductor industry. His work at KLA has allowed him to develop cutting-edge technologies that enhance the efficiency and accuracy of wafer inspections.
Collaborations
Throughout his career, Haurylau has collaborated with notable professionals in the field, including Robert M. Danen and Pavel Kolchin. These collaborations have contributed to the advancement of technologies that address complex challenges in semiconductor manufacturing.
Conclusion
Mikhail Haurylau's innovative work in wafer defect detection exemplifies the importance of advancements in semiconductor technology. His contributions continue to shape the industry and improve manufacturing processes.