The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
Feb. 06, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Jamie M. Sullivan, Eugene, OR (US);
Gary Janik, Palo Alto, CA (US);
Steve Cui, Fremont, CA (US);
Dieter Wilk, San Jose, CA (US);
Steve Short, San Jose, CA (US);
Mikhail Haurylau, San Jose, CA (US);
Qiang Q. Zhang, San Jose, CA (US);
Grace Hsiu-Ling Chen, Los Gatos, CA (US);
Robert M. Danen, San Jose, CA (US);
Suwipin Martono, Castro Valley, CA (US);
Shobhit Verma, Fremont, CA (US);
Wenjian Cai, Sunnyvale, CA (US);
Meier Brender, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An inspection system with selectable apodization includes an illumination source configured to illuminate a surface of a sample, a detector configured to detect at least a portion of light emanating from the surface of the sample, the illumination source and the detector being optically coupled via an optical pathway of an optical system, a selectably configurable apodization device disposed along the optical pathway, wherein the apodization device includes one or more apodization elements operatively coupled to one or more actuation stages configured to selectably actuate the one or more apodization elements along one or more directions, and a control system communicatively coupled to the one or more actuation and configured to selectably control apodization of illumination transmitted along the optical pathway by controlling an actuation state of the one or more apodization elements.