logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9989479 B1

PDFFull Text
Date of Patent:
Jun. 05, 2018

Filed:

Jun. 13, 2016

System and method to determine depth for optical wafer inspection

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Pavel Kolchin, Fremont, CA (US);

Mikhail Haurylau, San Jose, CA (US);

Robert Danen, Pleasanton, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:

Simpson & Simpson, PLLC

Primary Examiner:

Jamil Ahmed

Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/95 (2006.01); G06T 7/00 (2017.01); H04N 5/225 (2006.01); G01N 21/88 (2006.01); G02B 5/30 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9505 (2013.01); G01N 21/8851 (2013.01); G02B 5/3083 (2013.01); G06T 7/004 (2013.01); G06T 7/0012 (2013.01); G06T 7/0051 (2013.01); H04N 5/2256 (2013.01); G01N 2021/8874 (2013.01); G06T 2207/30148 (2013.01);
Abstract

A computer-based apparatus for adjusting an auto-focus in a wafer inspection system, including: a wafer adjustment system; and an electronic feedback loop system configured to compare an intensity of a first light beam rotating in a first spiral about a first central axis, and when the intensity is less than a preselected threshold, adjust, using the wafer adjustment system, a position of the wafer until the intensity reaches the preselected threshold.

Find Patent Forward Citations

Kolchin, Pavel. (2018). System and method to determine depth for optical wafer inspection (U.S. Patent No. 9989479). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9989479

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…