San Jose, CA, United States of America

Mihail Mihalov


Average Co-Inventor Count = 4.0

ph-index = 3

Forward Citations = 33(Granted Patents)


Company Filing History:


Years Active: 2009-2010

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3 patents (USPTO):Explore Patents

Title: Innovations of Mihail Mihalov

Introduction

Mihail Mihalov is a prominent inventor based in San Jose, CA, known for his contributions to optical metrology systems. With a total of 3 patents, Mihail has made significant advancements in the field, particularly in semiconductor manufacturing.

Latest Patents

Mihail's latest patents include a method and apparatus for designing an optical metrology system optimized with signal criteria. This innovative system is designed to measure structures on a workpiece, ensuring that it meets specific signal criteria. The optimization process utilizes collected signal data to enhance the system's performance. In one embodiment, the optical metrology system functions as a standalone unit, while in another, it is integrated with a fabrication cluster in semiconductor manufacturing.

Career Highlights

Mihail Mihalov is currently employed at Tokyo Electron Limited, where he continues to develop cutting-edge technologies in optical metrology. His work has been instrumental in improving measurement accuracy and efficiency in semiconductor processes.

Collaborations

Mihail collaborates with talented coworkers, including Xinkang Tian and Manuel B Madriaga, contributing to a dynamic and innovative work environment.

Conclusion

Mihail Mihalov's contributions to optical metrology systems reflect his dedication to innovation and excellence in the field. His patents and ongoing work at Tokyo Electron Limited continue to shape the future of semiconductor manufacturing.

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