Company Filing History:
Years Active: 2023-2025
Title: Michael Steigerwald: Innovator in Electron Beam Technology
Introduction
Michael Steigerwald is a prominent inventor based in Milpitas, CA (US). He has made significant contributions to the field of electron beam technology, holding a total of 4 patents. His work focuses on creating advanced electron-beam devices that enhance imaging and resolution capabilities.
Latest Patents
One of his latest patents is titled "Creating multiple electron beams with a photocathode film." This invention describes an electron-beam device that includes a laser and a photocathode film. The photocathode film emits a plurality of electron beamlets when illuminated from the back side using the laser. The device also features electrodes that extract the electron beamlets from the front side and control their shapes.
Another notable patent is "Method and system of image-forming multi-electron beams." This system can form hundreds of beamlets, focusing them to reduce Coulomb interaction effects and improve resolution. A Wien filter with electrostatic and magnetic deflection fields is employed to separate secondary electron beams from primary ones, correcting astigmatism and source energy dispersion blurs for all beamlets simultaneously.
Career Highlights
Michael Steigerwald is currently associated with Kla Corporation, where he continues to innovate in the field of electron beam technology. His work has been instrumental in advancing the capabilities of electron-beam devices, making them more efficient and effective for various applications.
Collaborations
Some of his notable coworkers include Youfei Jiang and Xinrong Jiang. Their collaborative efforts contribute to the ongoing research and development in electron beam technology.
Conclusion
Michael Steigerwald's contributions to electron beam technology through his patents and work at Kla Corporation highlight his role as a leading inventor in this field. His innovative approaches continue to push the boundaries of what is possible in electron beam applications.
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