The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
May. 31, 2022
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Xinrong Jiang, Palo Alto, CA (US);
Youfei Jiang, Milpitas, CA (US);
Michael Steigerwald, Milpitas, CA (US);
Ralph Nyffenegger, Palo Alto, CA (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2005.12); H01J 37/12 (2005.12); H01J 37/14 (2005.12); H01J 37/147 (2005.12); H01J 37/22 (2005.12); H01J 37/28 (2005.12);
U.S. Cl.
CPC ...
H01J 37/073 (2012.12); H01J 37/12 (2012.12); H01J 37/14 (2012.12); H01J 37/1472 (2012.12); H01J 37/22 (2012.12); H01J 37/28 (2012.12); H01J 2237/0492 (2012.12); H01J 2237/06333 (2012.12); H01J 2237/103 (2012.12); H01J 2237/2448 (2012.12);
Abstract
An electron-beam device includes a laser and a photocathode film. The photocathode film has a front side and a back side and emits a plurality of electron beamlets when illuminated from the back side using the laser. The electron-beam device also includes electrodes to extract the plurality of electron beamlets from the front side of the photocathode film and to control shapes of the plurality of electron beamlets.