Michael N Grimbergen

Title: Michael N Grimbergen: A Leader in Optical Technology Innovations

Introduction

Michael N Grimbergen, based in Redwood City, CA, is a distinguished inventor with an impressive portfolio of 42 patents. His contributions to the field of optical technology have propelled advancements in various applications, particularly in the areas of endpoint detection systems and etch processing technology.

Latest Patents

Among his most recent inventions is the “Adjustable Achromatic Collimator Assembly for Endpoint Detection Systems.” This innovative collimator assembly features a housing designed to optically couple with a process chamber, providing enhanced precision in targeting illumination on a specific surface area. The system utilizes an achromatic lens to direct multiple spectral components of light onto a target surface, ensuring that the two illuminated regions remain consistent and effectively configured for detection purposes.

Another significant patent is the “Etch Processing System Having Reflective Endpoint Detection.” This system integrates wafer and photomask processing equipment, incorporating an endpoint detection mechanism that employs a light source and photodetector. The light emitted towards an alignment region allows real-time monitoring of the etching process, optimizing control by analyzing reflections and enhancing alignment accuracy in substrate processing.

Career Highlights

Throughout his career, Michael has made substantial contributions to companies at the forefront of semiconductor technology. He has notably worked with Applied Materials, Inc., where his expertise in optical innovations has been instrumental in developing advanced processing technologies.

Collaborations

Michael's endeavors in innovation have been further supported by collaborations with notable colleagues, such as Ajay Kumar and Madhavi R Chandrachood. These partnerships have played an essential role in advancing their shared goals of achieving cutting-edge solutions in optical systems.

Conclusion

In summary, Michael N Grimbergen stands out as a prolific inventor whose advanced patents have significantly impacted the field of optical technology and processing systems. His work continues to influence future innovations, and his expertise underscores the importance of collaborative efforts in driving technological advancements.