The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2020
Filed:
Oct. 05, 2011
Alan H. Ouye, San Mateo, CA (US);
Graeme Scott, Mountain View, CA (US);
Keven Kaisheng Yu, Union City, CA (US);
Michael N. Grimbergen, Redwood City, CA (US);
Alan H. Ouye, San Mateo, CA (US);
Graeme Scott, Mountain View, CA (US);
Keven Kaisheng Yu, Union City, CA (US);
Michael N. Grimbergen, Redwood City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the invention generally provide a lid heater for a plasma processing chamber. In one embodiment, a lid heater assembly is provided that includes a thermally conductive base. The thermally conductive base has a planar ring shape defining an inner opening. The lid heater assembly further includes a heating element disposed on the thermally conductive base, and an insulated center core disposed across the inner opening of the thermally conductive base.