Union City, CA, United States of America

Keven Kaisheng Yu

USPTO Granted Patents = 3 

Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2014-2020

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3 patents (USPTO):

Title: Keven Kaisheng Yu: Innovator in Semiconductor Technology

Introduction

Keven Kaisheng Yu is a prominent inventor based in Union City, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing plasma processing techniques, which are crucial for the manufacturing of semiconductor devices.

Latest Patents

One of his latest patents is the "Chamber lid heater ring assembly." This invention provides a lid heater for a plasma processing chamber, featuring a thermally conductive base with a planar ring shape that defines an inner opening. The assembly includes a heating element on the thermally conductive base and an insulated center core across the inner opening.

Another notable patent is the "Method of silicon etch for trench sidewall smoothing." This method describes techniques for smoothing the sidewalls of trenches formed in semiconductor wafers through plasma etching. The process involves directionally etching the wafer with plasma generated from a fluorine gas, which helps achieve a smooth sidewall.

Career Highlights

Keven is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His innovative work has contributed to advancements in plasma processing technologies, making him a valuable asset to his organization.

Collaborations

Throughout his career, Keven has collaborated with notable colleagues, including Ajay Kumar and Alan Hiroshi Ouye. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Keven Kaisheng Yu is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the field. His patents reflect his commitment to innovation and excellence in plasma processing techniques.

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