Michael James Shillinger is a notable inventor based in Santa Ynez, CA (US). He has made significant contributions to the field of microelectromechanical systems (MEMS) with a focus on electrostatic switches. With a total of 2 patents, Shillinger's work exemplifies innovation and technical expertise.

Latest Patents

Shillinger's latest patents include a dual substrate electrostatic MEMS switch with a hermetic seal and a method of manufacture. This invention involves forming a cantilevered beam on a first substrate and electrical contacts on a second substrate, which are coupled using a hermetic seal made from a gold/indium alloy. The process allows for electrical access to the MEMS switch through vias in the second substrate. Another significant patent is a wafer-level method for probing micromechanical devices. This technique utilizes pressurized fluid from a nozzle to measure the mechanical properties of the device in a non-destructive and non-invasive manner.

Career Highlights

Shillinger is currently associated with Innovative Micro Technology, where he continues to push the boundaries of MEMS technology. His work has been instrumental in advancing the capabilities of micromechanical devices, making them more efficient and reliable.

Collaborations

Some of his notable coworkers include John Stuart Foster and Paul Rubel. Their collaborative efforts have contributed to the success of various projects within the company.

Conclusion

Michael James Shillinger's contributions to MEMS technology through his innovative patents and collaborations highlight his role as a leading inventor in the field. His work continues to influence the development of advanced microelectromechanical systems.