Innovative Micro Technology

Michael James Shillinger

John Stuart Foster

Paul Rubel

Kimon Rybnicek

Patrick Edward Feierabend

Andrew Dexter Wallis

Jeffrey F Summers

Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture

Pressurized fluid from a nozzle is applied against the movable member of a micromechanical device, in order to measure the mechanical properties of the device. The technique is non-destructive, non-invasive, can be applied at the wafer, row or die level, and at early or intermediate stages of fabrication.

Wafer level method for probing micromechanical devices

Growing community of inventors

Santa Ynez, CA, United States of America

Michael James Shillinger