The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2009
Filed:
Aug. 26, 2005
Andrew D. Wallis, Los Alamos, CA (US);
John S. Foster, Santa Barbara, CA (US);
Paul J. Rubel, Santa Barbara, CA (US);
Kimon Rybnicek, Santa Barbara, CA (US);
Michael J. Shillinger, Santa Ynez, CA (US);
Jeffrey F. Summers, Santa Barbara, CA (US);
Andrew D. Wallis, Los Alamos, CA (US);
John S. Foster, Santa Barbara, CA (US);
Paul J. Rubel, Santa Barbara, CA (US);
Kimon Rybnicek, Santa Barbara, CA (US);
Michael J. Shillinger, Santa Ynez, CA (US);
Jeffrey F. Summers, Santa Barbara, CA (US);
Innovative Micro Technology, Goleta, CA (US);
Abstract
Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.