Company Filing History:
Years Active: 2009-2010
Title: The Innovative Contributions of Jeffrey F. Summers
Introduction
Jeffrey F. Summers is a notable inventor based in Santa Barbara, California. He has made significant contributions to the field of microtechnology, particularly in the development of advanced encapsulation methods for microdevices. With a total of 2 patents, his work has paved the way for innovations in the manufacturing and functionality of microelectromechanical systems (MEMS).
Latest Patents
Summers' latest patents include the "Etching/bonding chamber for encapsulated devices and method of use." This patent describes a method for activating a getter at low temperature for encapsulation in a device cavity containing a microdevice. The process involves etching a passivation layer off the getter material while the device wafer and lid wafer are enclosed in a bonding chamber. A plasma etching process is utilized, where a large negative voltage is applied to the lid wafer, forming a plasma in the low-pressure environment within the bonding chamber. This plasma etches the passivation layer from the getter material, which is then sealed within the device cavity of the microdevice, all within the etching/bonding chamber.
Another significant patent is the "Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture." This patent outlines systems and methods for forming an electrostatic MEMS switch. It includes forming a cantilevered beam on a first substrate, creating electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may consist of a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch is achieved by forming vias through the thickness of the second substrate.
Career Highlights
Jeffrey F. Summers is currently associated with Innovative Micro Technology, where he continues to push the boundaries of microtechnology. His work has been instrumental in enhancing the performance and reliability of MEMS devices.
Collaborations
Throughout his career, Summers has collaborated with notable professionals in the field, including John Stuart Foster and Andrew Dexter Wallis. These collaborations have contributed to the advancement of technology in microdevices.
Conclusion
In summary, Jeffrey F. Summers is a distinguished inventor whose work in microtechnology has led to significant advancements in the field. His innovative patents and collaborations highlight his commitment to
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