Michael J Sershen

Title: Michael J Sershen: Innovator in Thin Film Deposition Systems

Introduction

Michael J Sershen is a prominent inventor based in Cambridge, MA (US), known for his contributions to the field of thin film deposition systems. With a total of 7 patents to his name, Sershen has made significant advancements in automated production technologies.

Latest Patents

One of his latest patents is titled "Automated batch production thin film deposition systems and methods of using the same." This invention focuses on fully automated batch production systems designed to deliver uniformity combined with high throughput at a low cost-per-wafer. The systems include automated safe wafer handling through low-impact batch transfer using transportable wafer racks loaded with multiple wafers. Additionally, the systems feature a modular pre-heat and cool-down architecture that provides a flexible thermal management solution tailored to specific requirements.

Career Highlights

Throughout his career, Michael J Sershen has worked with notable companies such as Veeco Instruments Inc. and Ultratech, Inc. His experience in these organizations has contributed to his expertise in the development of innovative technologies in the semiconductor industry.

Collaborations

Sershen has collaborated with talented individuals in his field, including coworkers Adam F Bertuch and Michael W Pacier. Their combined efforts have furthered advancements in thin film deposition technologies.

Conclusion

Michael J Sershen's work in automated batch production thin film deposition systems showcases his innovative spirit and dedication to advancing technology. His contributions continue to impact the semiconductor industry positively.