The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2025
Filed:
Feb. 19, 2020
Veeco Instruments Inc., Plainview, NY (US);
Michael W. Pacier, Leominster, MA (US);
Michael J. Sershen, Cambridge, MA (US);
Adam F. Bertuch, South Hamilton, MA (US);
Laurent Lecordier, Arlington, MA (US);
Thousif Ahamad Khan Hosakote Buden, Karnataka, IN;
Ramesh Prasad Manchaladore Narahari Rao, Karnataka, IN;
Veeco Instruments Inc., Plainview, NY (US);
Abstract
Fully automated batch production thin film deposition systems configured to deliver uniformity combined with high throughput at a low cost-per-wafer. In some examples, systems of the present disclosure include automated safe wafer handling via low-impact batch transfer via transportable wafer racks loaded with a plurality of wafers. In some examples, systems include a modular pre-heat & cool-down architecture that enables a flexible thermal management solution tailored around particular specifications.