Michael D. Robbins is a notable inventor based in Round Rock, TX (US). He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on improving inspection and processing techniques for semiconductor substrates.

Latest Patents

Robbins' latest patents include an "Automatic Wafer Edge Inspection and Review System." This innovative system provides a method for illuminating and inspecting a substrate, particularly its edge. It utilizes a light diffuser with multiple lights to ensure uniform diffuse illumination. An optic and imaging system is employed to inspect various surfaces of the substrate, including specular surfaces. The optic can be rotated radially to allow for focused inspection of all surfaces of the substrate edge.

Another significant patent is the "Apparatus for Shaping Thin Films in the Near-Edge Regions of In-Process Semiconductor Substrates." This apparatus is designed to shape and encapsulate the near-edge regions of a semiconductor wafer. It features a housing with a slot for receiving the edge of a wafer affixed to a rotatable chuck. The apparatus includes at least one plasma source that generates a flow of reactive gas towards the wafer's edge, along with a channel that directs a flow of diluent/quenching gas.

Career Highlights

Michael D. Robbins is currently employed at Accretech USA, Inc., where he continues to develop innovative solutions in semiconductor technology. His expertise and inventions have contributed to advancements in the industry.

Collaborations

Robbins has collaborated with talented coworkers, including Ju Jin and Satish Sadam, who share his commitment to innovation in semiconductor technology.

Conclusion

Michael D. Robbins is a distinguished inventor whose work in semiconductor technology has led to valuable patents and advancements in the field. His contributions continue to shape the future of semiconductor processing and inspection.