The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7508504 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 24, 2009

Filed:

Aug. 09, 2007
Applicants:

Ju Jin, Austin, TX (US);

Satish Sadam, Round Rock, TX (US);

Vishal Verma, Austin, TX (US);

Zhiyan Huang, Austin, TX (US);

Siming Lin, Austin, TX (US);

Michael D Robbins, Round Rock, TX (US);

Paul F. Forderhase, Austin, TX (US);

Inventors:

Ju Jin, Austin, TX (US);

Satish Sadam, Round Rock, TX (US);

Vishal Verma, Austin, TX (US);

Zhiyan Huang, Austin, TX (US);

Siming Lin, Austin, TX (US);

Michael D Robbins, Round Rock, TX (US);

Paul F. Forderhase, Austin, TX (US);

Assignee:

Accretech USA, Inc., Bloomfield Hills, MI (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.


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