Manhattan Beach, CA, United States of America

Michael D Lammert


Average Co-Inventor Count = 1.3

ph-index = 9

Forward Citations = 176(Granted Patents)


Company Filing History:


Years Active: 1987-2003

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15 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Michael D. Lammert

Introduction

Michael D. Lammert is a notable inventor based in Manhattan Beach, CA (US). He has made significant contributions to the field of technology, particularly in the area of semiconductor cleaning and thin film resistors. With a total of 15 patents to his name, Lammert's work has had a lasting impact on the industry.

Latest Patents

One of Lammert's latest patents is an automated spray cleaning apparatus for semiconductor wafers. This innovative device ensures that semiconductor wafers are uniformly and thoroughly cleaned of particulate and organic contaminants. The apparatus utilizes a hydraulic broom that sprays cleaning solution onto the wafer, effectively dislodging contaminants. Additionally, the broom features an aspirating nozzle that connects to a source of pressurized gas, such as nitrogen, and a source of cleaning fluid, like acetone. A programmed controller manages the broom's movement to guarantee comprehensive cleaning across the wafer's surface.

Another significant patent is a method for controlling the sheet resistance of thin film resistors. This method allows for inexpensive control of sheet resistance within tight tolerances. By determining a desired final value for the sheet resistance, Lammert's process involves depositing resistor material on a substrate and then adjusting the sheet resistance through etching or ion bombardment to achieve the desired final value.

Career Highlights

Throughout his career, Michael D. Lammert has worked with prominent companies such as TRW Limited and Northrop Grumman Systems Corporation. His experience in these organizations has contributed to his expertise and innovative capabilities in the field.

Collaborations

Lammert has collaborated with notable individuals in the industry, including George W. McIver and Alvin M. Kong. These collaborations have further enriched his work and contributed to the development of his patents.

Conclusion

Michael D. Lammert's contributions to technology through his patents and innovative methods have significantly advanced the fields of semiconductor cleaning and thin film resistors. His work continues to influence the industry and showcases the importance of innovation in technology.

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