The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2002
Filed:
Feb. 26, 2001
Michael D. Lammert, Manhattan Beach, CA (US);
TRW Inc., Redondo Beach, CA (US);
Abstract
A method for controlling the sheet resistance of thin film resistors. The sheet resistance can be inexpensively controlled within a tight tolerance by determining a desired final value for the sheet resistance of thin film resistor material to be deposited on a substrate, depositing the resistor material on the substrate using a deposition process which is consistent enough to achieve a target sheet resistance within a first specified tolerance, the resistor material being deposited to achieve a target sheet resistance which is equal to the desired final value minus the first specified tolerance, and removing a small amount of material from the surface of the deposited thin film resistor material by etching or ion bombardment to raise the sheet resistance to the desired final value within a second specified tolerance characteristic of the removing process where the second specified tolerance is less than the first specified tolerance.