Location History:
- Kent Vale, SG (2003)
- Hsin-Chu, TW (2005)
- Singapore, SG (1998 - 2008)
Company Filing History:
34 out of 962 
3 out of 40,927 
Years Active: 1998-2008
Title: Innovations and Contributions of Mei-Sheng Zhou
Introduction
Mei-Sheng Zhou is a prominent inventor based in Singapore, renowned for his significant contributions to the field of materials science and semiconductor technology. With an impressive portfolio of 37 patents, Zhou has made noteworthy advances that have influenced various industries, particularly in the applications of supercritical fluids and process control for semiconductor manufacturing.
Latest Patents
Two of Zhou’s latest patents illustrate his innovative approach to solving complex problems in the field:
1. **Surface Modification of a Porous Organic Material through the Use of a Supercritical Fluid** - This patent addresses the modification of organic layers, such as porous low-K dielectrics in integrated circuits. It describes a method where the porous layer is treated with a supercritical fluid that solvates the surface, leading to a phase transition that creates a dense, non-porous film and effectively seals the open pores.
2. **Advanced Process Control Approach for Cu Interconnect Wiring Sheet Resistance Control** - This innovative method presents a wafer-based approach for controlling the polishing step of copper interconnects. It utilizes a combination of feed forward and feedback models to minimize variations in sheet resistance, effectively adjusting the copper thickness and polish time based on metrology data from prior processes. This method has shown success in managing copper variations for the 90 nm technology node.
Career Highlights
Mei-Sheng Zhou has enjoyed a distinguished career in the semiconductor industry. Notably, he has held positions at Chartered Semiconductor Manufacturing Ltd and Taiwan Semiconductor Manufacturing Company Limited. His expertise in surface engineering and process control has made him a valuable asset in enhancing manufacturing techniques and product reliability.
Collaborations
Throughout his career, Zhou has collaborated with several prominent professionals, including Simon Yew-Meng Chooi and Subhash Gupta. These collaborations have resulted in significant advancements in their respective fields, reinforcing the impact of teamwork in driving innovation forward.
Conclusion
Mei-Sheng Zhou's contributions have left a lasting mark on the semiconductor industry and beyond. With 37 patents to his name, his innovations continue to address key challenges in materials science and manufacturing processes. As the demand for advanced technology grows, the significance of Zhou’s work will undoubtedly play a crucial role in shaping future innovations.