Company Filing History:
2 out of 5,671 
1 out of 927 
1 out of 4,883 
Years Active: 2014-2025
Title: The Innovative Mind of Matthias Ruhm
Introduction:
Matthias Ruhm, a prolific inventor based in Dresden, Germany, has made significant contributions to the field of semiconductor technology with his inventive patents. With a total of 3 patents to his name, Matthias Ruhm's work focuses on improving in-die overlay control and reducing asymmetric reticle heating in semiconductor manufacturing.
Latest Patents:
1. Method for in-die overlay control using FEOL dummy fill layer: Matthias Ruhm's patent introduces methods for precise in-die overlay reticle measurement by utilizing dummy fill layers in the front-end-of-line (FEOL) process. This innovation involves aligning overlay trenches with structures on a substrate to determine critical overlay parameters accurately.
2. Asymmetric reticle heating of multilayer reticles eliminated by dummy exposures and related methods: Another groundbreaking patent by Matthias Ruhm addresses the issue of asymmetric heating and thermal expansion in multilayer reticles. By incorporating dummy exposures and adjusting image field geometry, this patent aims to enhance the uniformity of reticle heating during semiconductor manufacturing processes.
Career Highlights:
Matthias Ruhm has garnered experience and expertise through his tenure at prominent companies in the semiconductor industry. He has notably worked at Globalfoundries Inc. and ASML Netherlands B.V., where he honed his skills in semiconductor technology and innovation.
Collaborations:
During his career, Matthias Ruhm has collaborated with distinguished professionals in the field, including Peter Moll and Martin Schmidt. Together, they have contributed to advancing semiconductor technologies and driving innovation within the industry.
Conclusion:
Matthias Ruhm's inventive spirit and dedication to advancing semiconductor technology have led to the development of groundbreaking patents that address critical challenges in the industry. His collaborative efforts and career highlights underscore his commitment to innovation and excellence in the field of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.