Location History:
- Santa Clara, CA (US) (2003)
- Berkeley, CA (US) (2005)
Company Filing History:
1 out of 1,787 
1 out of 641 
Years Active: 2003-2005
Title: Matthew Marcus: Innovator in Electron Microscopy
Introduction
Matthew Marcus is a notable inventor based in Berkeley, CA, who has made significant contributions to the field of electron microscopy. With a total of 2 patents, his work focuses on advanced methods for inspecting semiconductor wafers and masks.
Latest Patents
One of his latest patents is a "Photoelectron emission microscope for wafer and reticle inspection." This innovative method involves inspecting and imaging substrates using an electron beam. The process includes illuminating the substrate with a photon beam to induce photoemission of electrons. A low energy electron beam is utilized to minimize positive charging of the substrate. The reflected electrons and emitted photoelectrons are then imaged to facilitate substrate inspection.
Another significant patent is the "Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams." This novel dual beam low energy electron microscope (LEEM) apparatus is designed for inspecting semiconductor circuits or masks. It records many pixels in parallel, resulting in higher inspection rates compared to traditional scanning methods. The apparatus employs a low energy flood beam combined with a higher energy flood beam, effectively avoiding charging effects on insulating or partially insulating substrates.
Career Highlights
Matthew has worked with prominent companies such as Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His experience in these organizations has contributed to his expertise in the field of electron microscopy and semiconductor inspection.
Collaborations
Throughout his career, Matthew has collaborated with notable professionals, including David Lewis Adler and Lee H. Veneklasen. These collaborations have further enriched his work and innovations in the field.
Conclusion
Matthew Marcus stands out as an influential inventor in the realm of electron microscopy, with his patents paving the way for advancements in semiconductor inspection technology. His contributions continue to impact the industry significantly.