Masayuki Shinagawa

Title: Masayuki Shinagawa: Innovator in Silicon Wafer Technology

Introduction

Masayuki Shinagawa is a prominent inventor based in Nagasaki, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the development of epitaxial silicon wafers. With a total of 2 patents to his name, Shinagawa's work has advanced the efficiency and quality of silicon wafers used in various electronic applications.

Latest Patents

Shinagawa's latest patents include innovative methods and materials for enhancing silicon wafers. One of his notable inventions is an epitaxial silicon wafer that features reduced stacking faults. This wafer includes a silicon substrate doped with phosphorus, ensuring that its resistivity falls at or below 0.9 mΩ·cm. The design incorporates an epitaxial film on one side and an oxidation film on the opposite side, achieving an average of one or fewer Light Point Defects of 90 nm or more per square centimeter on the epitaxial film's surface.

Another significant patent is a method for growing an epitaxial film on a phosphorus-doped silicon wafer. This method involves several steps, including the formation of a backside oxidation film, its subsequent removal, and an argon-annealing process at high temperatures. This innovative approach enhances the quality of the epitaxial film formed on the silicon wafer.

Career Highlights

Throughout his career, Masayuki Shinagawa has worked with leading companies in the semiconductor industry, including Sumco Corporation and Sumco Techxiv Corporation. His experience in these organizations has allowed him to refine his expertise in silicon wafer technology and contribute to groundbreaking advancements in the field.

Collaborations

Shinagawa has collaborated with notable professionals in the industry, including Tadashi Kawashima and Naoya Nonaka. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Masayuki Shinagawa's contributions to silicon wafer technology have positioned him as a key figure in the semiconductor industry. His innovative patents and collaborative efforts continue to influence advancements in electronic materials.