Location History:
- Nirasaki, JP (2017)
- Beaverton, OR (US) (2017)
- Hillsboro, OR (US) (2021)
Company Filing History:
Years Active: 2017-2021
Title: Masashi Matsumoto: A Pioneer in Microelectronics Innovation
Introduction
Masashi Matsumoto, an influential inventor from Nirasaki, Japan, has made significant contributions to the field of microelectronics. With three patents to his name, he continues to push the boundaries of technology through innovative etching methods.
Latest Patents
Matsumoto's latest patents showcase his expertise in the microelectronics domain. One of his key inventions is a gas phase etch method that offers controllable etch selectivity for silicon-germanium alloys. This method describes the dry removal of material on microelectronic workpieces. The process involves exposing a substrate containing a silicon-germanium alloy, represented as SiGe, to a controlled gas-phase environment with an anhydrous halogen compound, enabling selective etching.
Another notable patent concerns an etching method that enhances precision in substrate treatment. This method entails loading a target substrate with a silicon nitride film into a chamber, where a fluorine-containing gas and excited oxygen gas are supplied. This allows for selective etching of the silicon nitride film in relation to polysilicon and silicon oxide films.
Career Highlights
Matsumoto currently works at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment sector. His work here emphasizes the application of advanced etching techniques, contributing significantly to the efficiency and effectiveness of microelectronic device production.
Collaborations
Throughout his career, Matsumoto has collaborated with esteemed colleagues, including Nobuhiro Takahashi and Junichiro Matsunaga. Together, they have worked on various projects, advancing the state of technology in their field and contributing to significant innovations in microelectronics.
Conclusion
Masashi Matsumoto's dedication to innovation in etching technologies has positioned him as a pivotal figure in the microelectronics industry. His patents reflect a commitment to enhancing manufacturing processes, paving the way for future technological advancements. As he continues to innovate, his work undoubtedly influences the landscape of microelectronics, benefiting both the industry and consumers alike.