Zama, Japan

Masaru Kasai

This inventor holds 2 USPTO granted patents. Top assignees: Kabushiki Kaisha Toshiba, Shibaura Engineering Works Co., Ltd., Shibaura Mechatronics Corporation. Active years: 1998-2002.


% Patents Active = 100.0

Average Co-Inventor Count = 1.8

ph-index = 2

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 1998-2002

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2 patents (USPTO):Explore Patents

Title: The Innovative Journey of Masaru Kasai

Introduction

Masaru Kasai, a talented inventor based in Zama, Japan, has made significant contributions to the field of vacuum processing technology. With a total of two patents to his name, Kasai's work focuses on advancing methods that enhance the efficiency and effectiveness of processing organic materials and metal films.

Latest Patents

Kasai's latest inventions showcase his ingenuity in the field. His first patent, the "Vacuum Processing Method and Vacuum Processing Apparatus," outlines a novel approach to produce fluorine radicals. This apparatus activates a fluorinating gas to fluorinates surfaces of components made from organic materials. The innovative process ensures that the object is carried into the processing chamber only after completing the fluorination process. This groundbreaking approach prevents the etching of organic material components during subsequent processing with a gas that contains oxygen radicals.

His second patent, the "Metal Film Etching Method," details a selective etching technique applicable to metal films on insulating layers with viaholes. This method employs a reactive gas mixture containing fluorine, chlorine, and oxygen to remove portions of the metal film without creating pits in the regions that fill the viaholes. This innovation significantly enhances the precision of electronic manufacturing processes.

Career Highlights

Throughout his career, Masaru Kasai has worked with esteemed organizations such as Toshiba Corporation and Shibaura Engineering Works Co., Ltd. His experience in these companies has undoubtedly shaped his expert understanding of vacuum processing technologies and catalyzed his innovative thinking.

Collaborations

Collaborating with talented individuals often leads to groundbreaking innovations. Masaru Kasai has had the pleasure of working alongside distinguished colleagues like Kei Hattori and Akira Kobayashi. These professional relationships have fostered a shared environment of creativity and forward-thinking in the research and development of new technologies.

Conclusion

Masaru Kasai's contributions to vacuum processing technology demonstrate his role as a pioneering inventor. With a focus on improving methods for processing organic materials and metal films, he continues to influence the industry significantly. His patents are a testament to the innovative spirit that drives advancements in technology and engineering.

Profile summary based on public USPTO records.
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