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Kanagawa, Japan

Shibaura Mechatronics Corporation

USPTO Granted Patents = 179

% Expired Patents = 24.0

EPO Patents = 16

Forward Citations = 411

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177 inventors (with patents filed for the assignee):

Konosuke Hayashi (20 out of 20 patents)

Kensuke Demura (19 out of 19 patents)

Masaaki Furuya (17 out of 20 patents)

4. Shinichi Ogimoto (15 out of 15 patents)

5. Hideki Mori (14 out of 50 patents)

6. Yoshinori Hayashi (13 out of 140 patents)

7. Daisuke Matsushima (12 out of 12 patents)

8. Azusa Hirano (12 out of 12 patents)

9. Nobuo Kobayashi (11 out of 18 patents)

10. Yasutsugu Tsuruoka (11 out of 11 patents)

11. Yuji Nagashima (11 out of 13 patents)

12. Masaya Kamiya (10 out of 10 patents)

13. Takashi Ootagaki (10 out of 10 patents)

14. Noboru Kuriyama (9 out of 12 patents)

15. Yoshio Kawamata (8 out of 8 patents)

Core Competencies:

Substrate Processing Apparatus

Film Formation Apparatus

Plasma Processing Apparatus

Substrate Treatment Device

Tablet Printing Apparatus

Processing Liquid Supply Device

Cooling Device

Electromagnetic Wave Attenuator

Supply System

Heater Pipe Gas Leak Detector

Imprint Template Manufacturing

Substrate Transfer Apparatus

179 patents: Sort by Forward Citations

1. 12707930 - Wafer storage container processing apparatus (2026-08-11),

2. 12686037 - Substrate treatment apparatus and processing method of substrate (2026-07-21),

3. 12642031 - Substrate cleaning apparatus (2026-05-26),

4. 12629730 - Cleaning apparatus (2026-05-19),

5. 12532709 - Substrate processing apparatus (2026-01-20),

6. 12472534 - Substrate processing apparatus (2025-11-18),

7. 12412756 - Processing liquid supply device, substrate processing apparatus, and method for inspecting processing liquid supply device (2025-09-09),

8. 12385125 - Film formation apparatus (2025-08-12),

9. 12365976 - Film forming apparatus (2025-07-22),

10. 12363801 - Heat treatment device (2025-07-15),

11. 12354869 - Substrate treatment method and substrate treatment apparatus (2025-07-08),

12. 12354854 - Film formation apparatus (2025-07-08),

13. 12347699 - Supply tank, supply device and supply system (2025-07-01),

14. 12318803 - Supply device and supply system (2025-06-03),

15. 12278120 - Substrate treatment device (2025-04-14),

Shibaura Mechatronics Corporation is a leading provider of advanced automation solutions. With a focus on mechatronics technologies, our company specializes in the development, manufacturing, and distribution of precision motion control systems and industrial robots. Our cutting-edge solutions empower industries worldwide to enhance efficiency, quality, and productivity. Through continuous innovation and uncompromising quality standards, we strive to exceed our customers' expectations and contribute to the advancement of society.

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Company Badge

USPTO Data Jan 1 1976 - Sep 15 2026

179 Patents

#22 in Kanagawa

#763 in Japan

#4,649 in the World

Kanagawa, Japan

Shibaura Mechatronics Corporation

Forward Citations = 411

177 inventors:

Konosuke Hayashi (20 out of 20 patents)

Kensuke Demura (19 out of 19 patents)

Masaaki Furuya (17 out of 20 patents)

4. Shinichi Ogimoto (15 out of 15 patents)

5. Hideki Mori (14 out of 50 patents)

Please report any incorrect information to [email protected]

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