This inventor holds 3 USPTO granted patents and 4 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2017-2022.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2017-2022
Title: Masaru Isago: Innovator in Plasma Processing Technology
Introduction
Masaru Isago is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of plasma processing apparatuses.
Latest Patents
One of Isago's latest patents is a plasma processing apparatus designed to achieve a uniform plasma space. This apparatus includes a processing vessel, a mounting table, a shield member, and a shutter for an opening that can be moved up and down. The processing vessel features a sidewall with a transfer path for carrying in and out processing target objects. The shield member surrounds the mounting table and has an opening facing the transfer path. The first driving unit moves the shutter vertically, while the second driving unit allows for forward-backward movement of the shutter with respect to the shield member.
Another notable patent is a method for cleaning a plasma processing apparatus. This method involves insulating part of the plasma treatment chamber, generating plasma from fluorocarbon gas, and removing deposits on non-plasma surfaces outside the chamber. The plasma from the fluorocarbon gas is introduced to the outside space to facilitate this cleaning process.
Career Highlights
Masaru Isago is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in advancing plasma processing technologies.
Collaborations
Isago has collaborated with notable coworkers, including Keigo Toyoda and Hiroshi Tsujimoto. Their combined expertise has contributed to the development of cutting-edge technologies in their field.
Conclusion
Masaru Isago's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative approaches continue to shape advancements in the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile