For the Inventor, By the Inventor

Enter inventor name

Kawasaki, Japan

Masami Takigawa

USPTO Granted Patents = 9

Average Co-Inventor Count = 5.9

ph-index = 5

Forward Citations = 63(Granted Patents)

Location History:

Kawasaki, JP (1996 - 2001)
Tokyo, JP (2002 - 2006)

Company Filing History:

7 out of 39,244

Fujitsu Corporation

Adv Antest Corporation

Years Active: 1996-2006

Loading Chart...

9 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7041512 - Electron beam exposure apparatus, electron beam exposing method, semiconductor element manufacturing method, and pattern error detection method (2006-05-09),

2. 6344655 - Multicolumn charged-particle beam lithography system (2002-02-05),

3. 6242751 - Charged-particle-beam exposure device and charged-particle-beam exposure method (2001-06-05),

4. 5969365 - Charged-particle-beam exposure device and charged-particle-beam exposure (1999-10-19),

5. 5965895 - Method of providing changed particle beam exposure in which (1999-10-12),

6. 5757015 - Charged-particle-beam exposure device and charged-particle-beam exposure (1998-05-26),

7. 5721432 - Method of and system for charged particle beam exposure (1998-02-24),

8. 5719402 - Method of and system for charged particle beam exposure (1998-02-17),

9. 5546319 - Method of and system for charged particle beam exposure (1996-08-13),

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com

Loading…