The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 1999
Filed:
Nov. 04, 1997
Takamasa Satoh, Kawasaki, JP;
Hiroshi Yasuda, Kawasaki, JP;
Junichi Kai, Kawasaki, JP;
Yoshihisa Oae, Kawasaki, JP;
Hisayasu Nishino, Kawasaki, JP;
Kiichi Sakamoto, Kawasaki, JP;
Hidefumi Yabara, Kawasaki, JP;
Isamu Seto, Kawasaki, JP;
Masami Takigawa, Kawasaki, JP;
Akio Yamada, Kawasaki, JP;
Soichiro Arai, Kawasaki, JP;
Tomohiko Abe, Kawasaki, JP;
Takashi Kiuchi, Kawasaki, JP;
Kenichi Miyazawa, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A method for providing charged particle beam exposure onto an object having a plurality of chip areas with a plurality of aligning marks formed in correspondence to each of said chip areas. A charged particle beam is irradiated upon an object mounted on a mobile step based upon positions of the aligning marks. Actual positions of the alignment marks are detected and compared to the design positions of the alignment marks to determine approximate relationships which are used to calculate an actual position to perform exposure.