Company Filing History:
Years Active: 1994-1999
Title: Hisayasu Nishino: Innovator in Charged Particle Beam Technology
Introduction
Hisayasu Nishino is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of 8 patents. His work focuses on improving the efficiency and accuracy of exposure systems used in various applications.
Latest Patents
Nishino's latest patents include a method for providing charged particle beam exposure onto an object with multiple chip areas. This method involves the use of aligning marks that correspond to each chip area. A charged particle beam is directed onto the object, and the actual positions of the alignment marks are detected and compared to their design positions. This process allows for precise calculations of the actual position for exposure. Another notable patent is a system designed to enhance the throughput of exposure systems. This system reduces the setting time during step changes in amplifier output by employing a correction waveform to cancel out glitches. Additionally, it improves the response speed of the main deflection by incorporating auxiliary deflection coils.
Career Highlights
Nishino is currently employed at Fujitsu Corporation, where he continues to innovate in the field of charged particle beam technology. His work has been instrumental in advancing the capabilities of exposure systems, making them more efficient and reliable.
Collaborations
Throughout his career, Nishino has collaborated with notable colleagues such as Hiroshi Yasuda and Yoshihisa Oae. These collaborations have contributed to the development of cutting-edge technologies in the field.
Conclusion
Hisayasu Nishino's contributions to charged particle beam technology have established him as a key figure in the industry. His innovative patents and ongoing work at Fujitsu Corporation continue to push the boundaries of what is possible in this field.
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