This inventor holds 50 USPTO granted patents, primarily in Charged Particle Beam Exposure (CPC class 2504). Top assignees: Fujitsu Corporation, Adv Antest Corporation. Active years: 1990-2001.
Inventors with similar research interests:
Location History:
- Kanagawa, JP (1993)
- Tokyo, JP (1990 - 2000)
- Kawasaki, JP (1992 - 2001)
Company Filing History:
Years Active: 1990-2001
Areas of Expertise:
Title: Kiichi Sakamoto: A Pioneer in Charged-Particle Beam Technology
Introduction
Kiichi Sakamoto, based in Kawasaki, Japan, is a distinguished inventor with an impressive portfolio of 50 patents. His groundbreaking work primarily focuses on advancements in charged-particle beam exposure technology, significantly impacting various manufacturing processes.
Latest Patents
Sakamoto's latest patents showcase innovative methods and devices related to charged-particle beam exposure. One notable patent details a method of exposing a wafer to a charged-particle beam. This method involves directing the beam, which is deflected by a deflector, towards the wafer. It includes a series of steps, such as arranging multiple first marks at varying heights, using a focus coil to focus the beam on each mark, and determining deflection-efficiency-correction coefficients based on focus distances. Furthermore, another patent addresses the detection of deficiencies in an aperture used during the charged-particle beam exposure process across multiple exposure columns.
Career Highlights
Throughout his career, Kiichi Sakamoto has made pivotal contributions while working for renowned companies like Fujitsu Corporation and Advantest Corporation. His expertise in charged-particle beam technology has positioned him as a leader in the field, driving innovations that enhance the efficiency and accuracy of manufacturing processes.
Collaborations
Sakamoto has collaborated with notable colleagues in the industry, including Yasushi Takahashi and Hiroshi Yasuda. These partnerships have enabled him to combine expertise and insights, fostering a creative environment that has led to several of his patents.
Conclusion
Kiichi Sakamoto’s contributions to charged-particle beam technology are remarkable, with a wealth of patents that highlight his innovative ideas. His career reflects a commitment to advancing technology and a collaborative spirit that has inspired many within the field. As he continues to develop new methods and devices, Sakamoto remains a significant figure in the innovation landscape of Japan and beyond.