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For the Inventor, By the Inventor

Tokyo, Japan

Masaki Tozawa

This inventor holds 5 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2001-2009.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Masaki Tozawa. Retrieved from https://idiyas.com/inventor/masaki-tozawa

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 5

% Patents Active = 60.0

Average Co-Inventor Count = 3.7

ph-index = 4

Forward Citations = 101(Granted Patents)


Location History:

  • Hachioji, JP (2002)
  • Fussa, JP (2001 - 2006)
  • Tokyo, JP (2009)

Company Filing History:

goldMedal5 out of 10,904 
 
Tokyo Electron Limited
 patents

Years Active: 2001-2009

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5 patents (USPTO):Explore Patents
1. 7636608 - Method for dynamic sensor configuration and runtime execution (2009-12-22),
2. 7113838 - Method and apparatus for monitoring tool performance (2006-09-26),
3. 6443165 - Method for cleaning plasma treatment device and plasma treatment system (2002-09-03),
4. 6355902 - Plasma film forming method and plasma film forming apparatus (2002-03-12),
5. 6215087 - Plasma film forming method and plasma film forming apparatus (2001-04-10),

Title: Masaki Tozawa: Innovator in Semiconductor Processing Technologies

Introduction

Masaki Tozawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor processing, holding a total of 5 patents. His work focuses on enhancing the efficiency and performance of semiconductor processing systems through innovative methods and technologies.

Latest Patents

Tozawa's latest patents include a "Method for dynamic sensor configuration and runtime execution." This invention presents graphical user interfaces (GUIs) designed for configuring and setting up dynamic sensors that monitor tool and process performance in semiconductor processing systems. The system comprises various processing tools, processing modules, and sensors. The GUI is web-based, allowing users to perform configuration and setup tasks with minimal input while clearly displaying all significant parameters.

Another notable patent is the "Method and apparatus for monitoring tool performance." This invention outlines a method and system for monitoring the performance of processing tools within a semiconductor processing system. It includes an alarm management system and a tool health control strategy that collects and analyzes tool health data. The intervention manager can pause the processing tool when an alarm occurs, ensuring optimal tool performance.

Career Highlights

Masaki Tozawa is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work at the company has been instrumental in advancing technologies that improve semiconductor processing efficiency.

Collaborations

Tozawa collaborates with talented individuals such as Takashi Akahori and Yoko Naito, contributing to innovative projects within the semiconductor field.

Conclusion

Masaki Tozawa's contributions to semiconductor processing technologies through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His inventions continue to shape the future of semiconductor processing systems.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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