Masahiro Nagatani

Title: Masahiro Nagatani: Innovator in Plasma Processing Technology

Introduction

Masahiro Nagatani is a prominent inventor based in Tokyo, Japan, known for his significant contributions to plasma processing technology. With a total of seven patents to his name, Nagatani has made remarkable advancements in the field, particularly in the design and functionality of plasma processing apparatuses.

Latest Patents

Nagatani's latest patents include a plasma processing apparatus and a plasma processing method. The plasma processing apparatus features a chamber equipped with an electrode for substrate placement, a power supply, and a control device. This control device is designed to execute various discharge conditions to generate plasma for heating the inner wall surface and processing substrates effectively. Another notable patent is the inspection method for plasma processing apparatuses, which involves a detailed inspection of source gas supply paths to detect any leakage in valves using inert gas flow and pressure changes.

Career Highlights

Throughout his career, Masahiro Nagatani has worked with esteemed companies such as Hitachi High-Tech Corporation and Hitachi High-Technologies Corporation. His experience in these organizations has allowed him to refine his expertise in plasma processing technologies and contribute to innovative solutions in the industry.

Collaborations

Nagatani has collaborated with notable colleagues, including Yasushi Sonoda and Naoyuki Kofuji. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas in the field of plasma processing.

Conclusion

Masahiro Nagatani's work in plasma processing technology exemplifies the impact of innovation in modern manufacturing processes. His patents and career achievements highlight his dedication to advancing technology and improving efficiency in the industry.