Company Filing History:
Years Active: 2025
Title: Masahiko Yokoi: Innovator in Semiconductor Fabrication
Introduction
Masahiko Yokoi is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of semiconductor fabrication, holding a total of 3 patents. His innovative methods have advanced the technology used in the semiconductor industry.
Latest Patents
Yokoi's latest patents include a method for etching for semiconductor fabrication. This method involves processing a substrate by patterning a mask over a dielectric layer and etching openings in the dielectric layer. The dielectric layer is disposed over the substrate, and the etching process includes flowing an etchant, a polar or H-containing gas, and a phosphorus-halide gas. Additionally, the method may further include forming contacts by filling the openings with a conductive material.
Another notable patent is the plasma processing method and plasma processing apparatus. This method is performed in a plasma processing apparatus and involves preparing a substrate that includes a silicon-containing film and a carbon-containing film. The process includes setting the substrate temperature to a first temperature of 0° C. or less, supplying HO to the substrate using a first processing gas, and forming plasma from the first processing gas using a radio frequency to etch the carbon-containing film. The method continues with setting the substrate temperature to a second temperature and supplying a second processing gas to etch the silicon-containing film.
Career Highlights
Masahiko Yokoi works at Tokyo Electron Limited, a leading company in the semiconductor industry. His work has been instrumental in developing advanced technologies that enhance semiconductor fabrication processes.
Collaborations
Yokoi has collaborated with notable coworkers, including Du Zhang and Yu-Hao Tsai. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
Masahiko Yokoi's innovative contributions to semiconductor fabrication have established him as a key figure in the industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.