Company Filing History:
Years Active: 1993-2013
Title: Innovations of Masahiko Tanaka
Introduction
Masahiko Tanaka is a notable inventor based in Amagasaki, Japan. He has made significant contributions to the field of plasma processing technology, holding two patents that showcase his innovative approach to etching methods and devices.
Latest Patents
One of his latest patents is a plasma etching method capable of detecting the end point and a plasma etching device therefor. This invention relates to a plasma etching method that eliminates the need for a special area to detect the end point. The etching process involves two steps: a large-amount supply step of supplying a significant amount of SF gas and a small-amount supply step for a lesser amount. An end-point detector measures the emission intensity of silicon or silicon fluoride in the plasma during the small-amount supply step. The etching end point is determined when the measured intensity falls to or below a predetermined reference value.
Another patent is for a microwave plasma processing device's window. This window consists of one or more pieces of dielectric materials. The surface facing the microwave transmitting horn is planar and extends perpendicularly to the axial direction. The opposite surface is recessed, creating a non-uniform thickness. The design allows for various shapes and sizes, accommodating the plasma formation chamber of the processing device.
Career Highlights
Masahiko Tanaka has worked with prominent companies in the industry, including Lam Research Corporation and SPP Technologies Co., Ltd. His experience in these organizations has contributed to his expertise in plasma processing technologies.
Collaborations
Throughout his career, Tanaka has collaborated with notable professionals, including Ching-Hwa Chen and David R. Pirkle. These collaborations have further enriched his work and innovations in the field.
Conclusion
Masahiko Tanaka's contributions to plasma processing technology through his patents and career achievements highlight his role as an influential inventor. His innovative methods and devices continue to impact the industry significantly.