Location History:
- Odawara, JP (1996)
- Kanagawa, JP (2000)
- Kanagawa-ken, JP (1997 - 2002)
- Kawasaki, JP (2000 - 2005)
- Kumagaya, JP (2010 - 2013)
Company Filing History:
Years Active: 1996-2013
Title: Masaharu Kawakubo: Innovator in Lithography Technology
Introduction
Masaharu Kawakubo is a prominent inventor based in Kumagaya, Japan. He has made significant contributions to the field of lithography, particularly in the development of exposure methods and systems. With a total of 16 patents to his name, Kawakubo continues to push the boundaries of innovation in his field.
Latest Patents
Kawakubo's latest patents include an exposure method and a lithography system. In his exposure method, he addresses the challenge of image distortion by extracting distortion amounts in both the X-axis and Y-axis directions from previous processes. This synthesized image distortion data is then used for subsequent adjustments of projected images, allowing for high-accuracy overlay exposure. His correction method and exposure apparatus utilize mathematical functions to approximate the grid of a wafer, comparing residual errors to predetermined thresholds. This innovative approach enhances the precision of lithography processes.
Career Highlights
Kawakubo has dedicated his career to advancing lithography technology. His work at Nikon Corporation has positioned him as a key player in the industry. His inventions have not only improved the efficiency of exposure methods but have also contributed to the overall advancement of semiconductor manufacturing.
Collaborations
Throughout his career, Kawakubo has collaborated with notable colleagues, including Ryoichi Kaneko and Nobutaka Magome. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Masaharu Kawakubo's contributions to lithography technology exemplify the spirit of innovation. His patents and collaborative efforts continue to shape the future of the industry, making him a significant figure in the world of inventions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.