The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
May. 24, 2006
Masaharu Kawakubo, Kumagaya, JP;
Masaharu Kawakubo, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
In the case where the previous process (X) and the previous process (Y) are different in step, only a distortion amount in an X-axis direction is extracted from image distortion data of the previous process (X) in Stepand only a distortion amount in a Y-axis direction is extracted from image distortion data of the previous process (Y) in Step, and then in Step, image distortion data is created by synthesizing the extracted distortion amounts, and the synthesized image distortion data is used for subsequent adjustment of projected images. With this operation, the distortion of projected images can be adjusted per axis and accordingly overlay exposure with high accuracy can be realized.