Company Filing History:
Years Active: 2004-2008
Title: Martin Brunotte: Innovator in Microlithography
Introduction
Martin Brunotte is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative designs involving fluoride crystal lenses. With a total of 7 patents to his name, Brunotte's work has had a profound impact on image quality in projection systems.
Latest Patents
One of Brunotte's latest patents focuses on an objective for a microlithography projection system that incorporates at least one fluoride crystal lens. This invention addresses the detrimental effects of birefringence on image quality. By orienting the lens axis of the crystal lens substantially perpendicular to the {100}-planes or {100}-equivalent crystallographic planes of the fluoride crystal, the negative effects are significantly reduced. When utilizing two or more fluoride crystal lenses, it is essential that their lens axes are oriented in the (100)-, (111)-, or (110)-direction of the crystallographic structure, with rotated positions relative to each other. Furthermore, the use of groups of mutually rotated (100)-lenses in combination with groups of mutually rotated (111)- or (110)-lenses further minimizes birefringence-related effects. An additional improvement is achieved by applying a compensation coating to at least one optical element of the objective.
Career Highlights
Throughout his career, Martin Brunotte has worked with esteemed companies such as Carl Zeiss SMT AG and Schott Glas. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in optical technology.
Collaborations
Brunotte has collaborated with notable colleagues, including Christian Wagner and Winfried M. Kaiser. These partnerships have fostered an environment of innovation and creativity, leading to the development of advanced optical solutions.
Conclusion
Martin Brunotte's contributions to the field of microlithography through his innovative patents and collaborations highlight his status as a leading inventor. His work continues to influence the industry and improve image quality in projection systems.
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