Carl-zeiss-smt Ag

Schott Glas

Martin Brunotte

Manfred Maul

Christian Wagner

Winfried M Kaiser

Wilhelm Ulrich

Toralf Gruner

Michael Gerhard

Birgit Enkisch

Daniel Krähmer

Christof Zaczek

Jens Kugler

Hubert Holderer

Alexander Kohl

Jürgen Hartmaier

Gottfried Haas

Klaus Quast

An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis of the crystal lens is oriented substantially perpendicular to the {100}-planes or {100}-equivalent crystallographic planes of the fluoride crystal. If two or more fluoride crystal lenses are used, they should have lens axes oriented in the (100)-, (111)-, or (110)-direction of the crystallographic structure, and they should be oriented at rotated positions relative to each other. The birefringence-related effects are further reduced by using groups of mutually rotated (100)-lenses in combination with groups of mutually rotated (111)- or (110)-lenses. A further improvement is also achieved by applying a compensation coating to at least one optical element of the objective.

Objective with fluoride crystal lenses

A projection exposure apparatus for microlithography has a light source, an illumination system, a mask-positioning system and a projection lens. The latter has a system aperture plane and an image plane and contains at least one lens that is made of a material which has a birefringence dependent on the transmission angle. The exposure apparatus further has an optical element, which has a position-dependent polarization-rotating effect or a position-dependent birefringence. This element, which is provided close to a pupil plane of the projection exposure apparatus, compensates at least partially for the birefringent effects produced in the image plane by the at least one lens.

Projection lens and microlithographic projection exposure apparatus

The invention relates to a collector module ( ) comprising a collector pipe ( ) which has a inlet ( ) and an outlet ( ) for the heat transfer medium. Said collector module ( ) also comprises at least one co-axially cross-flown collector pipe ( ) which has a jacket pipe ( ), an absorber pipe ( ) and a co-axial pipe ( ). The aim of the invention is to produce a collector module which has good mounting qualities as well as good sealing abilities and increased endurance. According to the invention, the outlet ( ) comprises at least one hollow nipple ( ) which extends in the radial direction of the collector pipe, whereon at least one absorbing pipe ( ) is fixed in a co-axial manner, whereby at least one sealing element ( ) is arranged between the nipple ( ) and the absorbing pipe ( ). The inlet ( ) comprises at least one element ( ) for receiving the co-axial pipe. The at least one co-axial pipe ( ) is arranged in a coaxial manner inside the nipple ( ) and is pressed against the receiving element ( ) by an elastic element ( ) disposed on the end of the absorbing pipe ( ) opposite the collector pipe ( ).

Collector module

Growing community of inventors

Aalen, Germany

Martin Brunotte