Austin, TX, United States of America

Mark R Breen


Average Co-Inventor Count = 2.8

ph-index = 2

Forward Citations = 92(Granted Patents)


Company Filing History:


Years Active: 1996-2010

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3 patents (USPTO):Explore Patents

Title: Mark R Breen: Innovator in Semiconductor Technology

Introduction

Mark R Breen is a notable inventor based in Austin, TX, who has made significant contributions to the field of semiconductor technology. With a total of 3 patents to his name, Breen's work focuses on innovative methods for fabricating semiconductor devices and inspecting workpieces for residues.

Latest Patents

One of Breen's latest patents is a method for fabricating a semiconductor device. This method involves creating a gate electrode over a gate insulator, with a layer of spin-on glass that is UV opaque. The process is designed to maintain temperatures below 450°C throughout the fabrication steps. Another significant patent addresses resist removal monitoring using Raman spectroscopy. This method inspects workpieces for carbon residue by directing coherent radiation to produce Rayleigh and Raman scattered radiation, allowing for non-destructive residue inspection.

Career Highlights

Throughout his career, Mark R Breen has worked with prominent companies in the semiconductor industry, including Microelectronics and Computer Technology Corporation and Advanced Micro Devices Corporation. His expertise in semiconductor fabrication and inspection has positioned him as a valuable contributor to advancements in this field.

Collaborations

Breen has collaborated with notable colleagues such as Ernest R Nolan and Diana C Duane, further enhancing his work and contributions to semiconductor technology.

Conclusion

Mark R Breen's innovative patents and career achievements highlight his significant role in the semiconductor industry. His work continues to influence the development of advanced technologies in this critical field.

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